APPLICATIONS LOCATOR
Advancing Thermal Wafer Test Technologies

As a leader in precision thermal chuck technologies, ThermoChuck Systems fulfill a wide range of applications:
  • Thermal testing and cycling of wafers (to 300 mm), hybrids and other flat devices.
  • Probing at temperatures from -65º to +400ºC
  • High probe load applications
  • High power wafer and device testing
  • Femtoamp level, low leakage wafer measurements at temperature
  • Moisture-free cold probing, using Controlled Environment Enclosure
  • Probing at controlled ambient temperature.

Co-Axial and Tri-Axial Chucks are available for

  • High electrical isolation requirements
  • Low current measurements
  • Femtoamp level wafer probing
  • Guarding capability for low leakage applications

The Applications Locator table below will assist you in selecting the best system for your requirements.

Contact Temptronic for application assistance.



Temperature Range (°C) ThermoChuck Platform Surface to Ground Capacitance for HIGH ISOLATION ThermoChuck Platform Surface Electrical Isolation for HIGH ISOLATION applications High Power Device / Wafer Testing Probing at Controlled Ambient 300mm wafer probing
TP03000 -65°/ +200°C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25°C; Higher isolation options available. No Yes No
TP03010A +20°/ +200°C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25°C; Higher isolation options available No Yes No
TP03010B 0°/ +200°C 125mm: <375 pf available 150mm: <525 pf available 200mm: <950 pf available standard:109 ohms at 500 V DC between surface and ground at +25°C; Higher isolation options available No Yes No
TP03020B +20°/ +200°C 150mm: 6000 pf standard (High Isolation: 250 pf); 200mm : 10,000 pf standard ( High Isolation: 500 pf) standard:109 ohms at 500 V DC between surface and ground at +25°C; 1012 ohms option available No Yes No
TP0315A +30°/ +200°C

+30°/ +300°C 		125mm: 4500 pf standard (Low Capacitance option: 500 to 550 pf ); 150 mm: 6000 pf standard (Low capacitance option: 650 to 750 pf ) 109 ohms at 500 V DC between surface and ground; 1012 ohms option available No Yes No
TP0315B 0°/ +200°C

0°/ +300°C 		125mm: 4500 pf standard (Low Capacitance option: 500 to 550 pf); 150 mm: 6000 pf standard (Low Capacitance option: 650 to 750 pf ) 109 ohms at 500 V DC between surface and ground; 1012 ohms option available No Yes No
TP03500A
 		 -65°/ +200°C <750 pf standard;

<250 pf option available		 109 ohms standard

1014 ohms option available		 Yes Yes Yes
TP03500C +15° / +200° or +300°C

 

 <750 pf standard;

<250 pf option available		 109 ohms standard

1014 ohms option available		 Yes Yes Yes
TP03500D
(300 mm) 		+20° / +200° or +300°C or +400°C <800 pf standard;

<500 pf option available		 109 ohms standard

1014 ohms option available		 Yes Yes Yes
TP03500E
(300 mm)		 Ta (ambient) to +300°C  or +400°C <800 pf standard;

<500 pf option available		 109 ohms standard

1014 ohms option available		 Yes Yes Yes



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